真空紫外光源

1. 產品介紹:
加拿大Resonance公司從20世紀70年代就開始和加拿大空間局(CSA)專業研發生產紫外光源,并在80-90年代和NASA有著密切的合作,現在生產的真空紫外光源是基于Ar,He,Xe的高功率高通量的三種型號紫外光源,波長從范圍117-172nm,F在廣泛用于土壤成分檢測、氣體檢測、工業、石油業等。
2. 應用:
a. 工業污染控制(廢水處理、廢氣處理)
b. 表面改性(聚合物光蝕刻、光誘導化學蒸汽沉積)
c. 做一些樣品的的光譜測試
d. 樣品的透光性檢測
3. 產品參數:
型號
|
KrLM-L XeLM-L
|
KrLM-LQD XeLM-LQD
|
KrLM-LQD12
XeLM-LQD12
|
ArCM-L KrCM-L XeCM-L
|
ArCM-LPu KrCM-LPu XeCM-LPu
|
ArCM-QDHP KrCM-QDHP XeCM-QDHP
|
ArCM-LHP KrCM-LHP XeCM-LHP
|
單位
|
狀態
|
Production
|
Production
|
Production
|
Production
|
PreProd
|
PreProd
|
Development
|
|
峰值波長 Ar
|
|
|
|
128
|
128
|
128
|
128
|
nm
|
峰值波長 Kr
|
117, 124
|
117, 124
|
117, 124
|
117,124, 145
|
145
|
145
|
117, 124,
145
|
nm
|
峰值波長 Xe
|
147
|
147
|
147
|
147, 172
|
172
|
172
|
147, 172
|
nm
|
VUV通量 Ar
|
na
|
na
|
na
|
5 x 1014
|
1 x 1015
|
6 x 1015
|
2 x 1016
|
P/sec/str
|
VUV通量 Kr
|
3 x 1015
|
3 x 1015
|
3 x 1015
|
5 x 1015
|
1 x 1016
|
6 x1016
|
2 x 1017
|
P/sec/str
|
VUV通量 Xe
|
5 x 1015
|
5 x 1015
|
5 x 1015
|
7 x 1015
|
1.5 x 1017
|
1 x 1017
|
3 x 1017
|
P/sec/str
|
全角輸出圓錐
|
45
|
45
|
45
|
45
|
40
|
45
|
45
|
度
|
燈泡窗口位置
|
-4
|
+1
|
10 - 30
|
-4
|
-1
|
3 -20
|
3
|
cm
|
Window CA
|
0.8
|
0.8
|
0.8
|
0.8
|
0.8
|
6 x 0.8
|
6 x1.8
|
cm
|
調制和脈沖
|
Mod/option
|
Mod/option
|
Mod/option
|
Mod/option
|
P
2µsec/1KHz
|
Mod/option
|
CW
|
|
標準法蘭
|
2.75” CF
|
2.75” CF
|
2.75” CF
|
2.75” CF
|
2.75” CF
|
4.5” CF
|
4.5” CF
|
英寸
|
特點
|
Opt. additional window or lens flange
|
Rapid lamp interchange, closer to target
|
Can be close to target deep in vac. chamber
|
Continuum, good for absorption spectra
|
Unique VUV pulses Photoionizatio n
|
Higher intensity
|
Higher intensity
|
|
型號
|
AaBC-DEF where Aa = gas e. g. Kr = Krypton, Xe = Xenon; B = Line or continuum e. g. L = line and C = mixed continuum and line or pure
continuum, C=Window material e. g. M = Magnesium fluoride: -DEF is source configuration e. g. -L = standard lab model, QD = Quick
Disconnect, LPu = lab model pulsed, 12QD = 12 inch re-entrant lamp with Quick disconnect flange, LHP = Lab High
Power
|
狀態
|
Production = in production, PreProd = pre production prototype tested, Developmental: Still in development
|
光譜類型
|
Line: lines at 116.5 and 123.6 nm Krypton, Lines at 129 and 147 Xenon (Argon lines not transmitted by MgF2 window), Mixed: lines at 116.5 and 123.6 nm and Excimer continuum from 123.6 to 170nm which peaks at 145nm, Xenon line at
147 and continuum pk 172
Continuum: Excimer continuum: Ar 110 to 140 nm, Kr 123.6 to 170 nm Xe 145 to 200
|
窗口位置
|
Relative to the front the CF flange face. – x.y are away from flange and +x.y depth into vacuum chamber from flange face.
|
調制脈沖
|
Mod/optional: Option to modulate from 1 to 1,000 Hz. P 2μsec/1KHz means that lamp has 2 microsecond pulses driven
by DC pulse supply at
about 1 KHz. Syncing this supply with an external waveform is possible, CW means continuous in time
|
系統
|
Complete system includes power supply, EMI shielded enclosure, Vacuum flange and NIST traceable test on vacuum monochromator
|
|